National Repository of Grey Literature 9 records found  Search took 0.00 seconds. 
Electron lithography in scanning electron microscope
Haviar, Stanislav ; Matolín, Vladimír (advisor) ; Lopour, Filip (referee)
Electron beam lithography in a scanning electron microscope Tescan Miran LMH is described. Detailed parametres of preparation procedure of metal structures with characteristic dimensions below 100 nm were obtained. Additionally, a preparation of square arrays of sub 100-nm metal dots with 1 µm periode is being discussed. The lithography was performend with self-prepared resist layers (thickness < 25 nm), parameters of the spin-coating procedure are listed as well. A construction of a model single-wire sensor is described. The sensor had macroscopic gold contacts with thin (< 200 nm) tin oxide wires in between. The structures were investigated by means of scanning electron microscopy and atomic force microscopy.
Preparation and characterization of nanostructures for catalysis and gas detection
Haviar, Stanislav ; Matolínová, Iva (advisor) ; Zahoran, Miroslav (referee) ; Plšek, Jan (referee)
First part of this thesis is focused on magnetron sputtering deposited layers of cerium oxide using carbonaceous substrates. Micrographs from scanning and transmission electron microscopes reveal that cerium oxide layers exhibit remarkable roughness and nano-porosity. In this work there are presented optimized key preparation parameters for growth of highly nano-porous layers of cerium oxide on amorphous graphite as well as on graphite foil. The effect of residual atmosphere during the magnetron sputtering deposition is discussed. Results of deposition using oxygen/argon mixture as working gas are presented. A simple growth model is formulated and discussed. Second part deals with utilization of cerium and tungsten oxides as conductometric gas sensors. A testing station was constructed for gathering sensorial properties of such devices. The construction and abilities of the measuring system designed by the author are noted. Preliminary results of measurements of response to hydrogen are presented. Cerium oxide layers suprisingly exhibit measurable response to hydrogen gas. Tungsten oxide nanowires grown on mica substrate were formed into gas sensor via electron beam lithography and show high sensitivity. Powered by TCPDF (www.tcpdf.org)
Preparation and characterization of nanostructures for catalysis and gas detection
Haviar, Stanislav
First part of this thesis is focused on magnetron sputtering deposited layers of cerium oxide using carbonaceous substrates. Micrographs from scanning and transmission electron microscopes reveal that cerium oxide layers exhibit remarkable roughness and nano-porosity. In this work there are presented optimized key preparation parameters for growth of highly nano-porous layers of cerium oxide on amorphous graphite as well as on graphite foil. The effect of residual atmosphere during the magnetron sputtering deposition is discussed. Results of deposition using oxygen/argon mixture as working gas are presented. A simple growth model is formulated and discussed. Second part deals with utilization of cerium and tungsten oxides as conductometric gas sensors. A testing station was constructed for gathering sensorial properties of such devices. The construction and abilities of the measuring system designed by the author are noted. Preliminary results of measurements of response to hydrogen are presented. Cerium oxide layers suprisingly exhibit measurable response to hydrogen gas. Tungsten oxide nanowires grown on mica substrate were formed into gas sensor via electron beam lithography and show high sensitivity. Powered by TCPDF (www.tcpdf.org)
Gas sensing properties of tungsten oxide thin films
Vojík, Jiří ; Mašek, Karel (advisor) ; Haviar, Stanislav (referee)
The purpose of this thesis is a study of sensing properties of pure, platinum-doped and gold-doped tungsten oxide thin films. Required films were prepared by magnetron sputtering on glass and passivated silicon. Their chemical composition was investigated by XPS. The morphology of the films was measured using AFM and SEM. Sensing response of these films to hydrogen was investigated in the range from 1,000 to 10,000 ppm and temperatures between 100 and 350 řC. It was found that platinum oxides PtO2 and PtO were partially reduced during the sensing tests. The possible encapsulation of the platinum by the tungsten oxide was discovered. The sensitivity of the metal doped films was much higher than the sensitivity of the pure films. In the case of platinum-doped films the sensitivity decreased with increasing temperature in contrast to the gold-doped films where the sensitivity increased. The gold was present in two metallic and oxidized states. The gold was reduced during the reactions with hydrogen. After the sensing tests, the size of crystalline grains increased and the platinum-doped films became coarser.
Preparation and characterization of nanostructures for catalysis and gas detection
Haviar, Stanislav
First part of this thesis is focused on magnetron sputtering deposited layers of cerium oxide using carbonaceous substrates. Micrographs from scanning and transmission electron microscopes reveal that cerium oxide layers exhibit remarkable roughness and nano-porosity. In this work there are presented optimized key preparation parameters for growth of highly nano-porous layers of cerium oxide on amorphous graphite as well as on graphite foil. The effect of residual atmosphere during the magnetron sputtering deposition is discussed. Results of deposition using oxygen/argon mixture as working gas are presented. A simple growth model is formulated and discussed. Second part deals with utilization of cerium and tungsten oxides as conductometric gas sensors. A testing station was constructed for gathering sensorial properties of such devices. The construction and abilities of the measuring system designed by the author are noted. Preliminary results of measurements of response to hydrogen are presented. Cerium oxide layers suprisingly exhibit measurable response to hydrogen gas. Tungsten oxide nanowires grown on mica substrate were formed into gas sensor via electron beam lithography and show high sensitivity. Powered by TCPDF (www.tcpdf.org)
Preparation and characterization of nanostructures for catalysis and gas detection
Haviar, Stanislav ; Matolínová, Iva (advisor) ; Zahoran, Miroslav (referee) ; Plšek, Jan (referee)
First part of this thesis is focused on magnetron sputtering deposited layers of cerium oxide using carbonaceous substrates. Micrographs from scanning and transmission electron microscopes reveal that cerium oxide layers exhibit remarkable roughness and nano-porosity. In this work there are presented optimized key preparation parameters for growth of highly nano-porous layers of cerium oxide on amorphous graphite as well as on graphite foil. The effect of residual atmosphere during the magnetron sputtering deposition is discussed. Results of deposition using oxygen/argon mixture as working gas are presented. A simple growth model is formulated and discussed. Second part deals with utilization of cerium and tungsten oxides as conductometric gas sensors. A testing station was constructed for gathering sensorial properties of such devices. The construction and abilities of the measuring system designed by the author are noted. Preliminary results of measurements of response to hydrogen are presented. Cerium oxide layers suprisingly exhibit measurable response to hydrogen gas. Tungsten oxide nanowires grown on mica substrate were formed into gas sensor via electron beam lithography and show high sensitivity. Powered by TCPDF (www.tcpdf.org)
Electron lithography in scanning electron microscope
Haviar, Stanislav ; Lopour, Filip (referee) ; Matolín, Vladimír (advisor)
Electron beam lithography in a scanning electron microscope Tescan Miran LMH is described. Detailed parametres of preparation procedure of metal structures with characteristic dimensions below 100 nm were obtained. Additionally, a preparation of square arrays of sub 100-nm metal dots with 1 µm periode is being discussed. The lithography was performend with self-prepared resist layers (thickness < 25 nm), parameters of the spin-coating procedure are listed as well. A construction of a model single-wire sensor is described. The sensor had macroscopic gold contacts with thin (< 200 nm) tin oxide wires in between. The structures were investigated by means of scanning electron microscopy and atomic force microscopy.

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