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Thermal stability of Ti/Ni multilayer thin films
Václavík, R. ; Zábranský, L. ; Souček, P. ; Sťahel, P. ; Buršík, Jiří ; Fořt, Tomáš ; Buršíková, V.
In this work, thermal stability and mechanical properties of Ti/Ni multilayer thin films were studied. The multilayer thin films were synthesised by alternately depositing Ti and Ni layers using magnetron sputtering. The thickness of constituent layers of Ti and Ni varied from 1.7 nm to 10 nm, and one coating was deposited by simultaneous sputtering of both targets. Single crystalline silicon was used as a substrate. The effects of thermal treatment on the mechanical properties were studied using nanoindentation and discussed in relation to microstructure evaluated by X-ray diffraction. Annealing was carried out under low-pressure conditions for 2 hours in the range of 100-800 degrees C.
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Study of mechanical properties of nanolayered Ti/Ni coatings
Zábranský, L. ; Václavík, R. ; Přibyl, R. ; Ženíšek, J. ; Souček, P. ; Buršík, Jiří ; Fořt, Tomáš ; Buršíková, V.
The aim of the present work was to study the dependence of mechanical properties of Ti/Ni multilayer thin films on the thicknesses of constituent Ti and Ni layers. The multilayer thin films were synthesized by deposition of Ti and Ni layers alternately on single crystalline silicon substrates using direct current magnetron sputtering method. Thicknesses of Ti and Ni layers varied from 1.7 nm to 100 nm. The micro-structure of the multilayer films was studied using X-ray diffraction technique, scanning electron microscopy with focused ion beam technique and transmission electron microscopy. Mechanical properties obtained from nanoindentation experiments were discussed in relation to microstructural observations.
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SMV-2018-04: Planar microstructures for optical applications
Horáček, Miroslav ; Kolařík, Vladimír ; Matějka, Milan ; Krátký, Stanislav ; Chlumská, Jana ; Meluzín, Petr ; Král, Stanislav ; Fořt, Tomáš ; Oulehla, Jindřich ; Pokorný, Pavel
The development of planar microstructures for optical applications, and subsequent realization of samples by the way of e-beam lithography and other techniques. Project deals with material study suited for the fabrication of planar microstructures in thin metallic layer with respect to achievable resolution and fulfilling the absorbance parameters for particular application. E-beam lithography is used for preparation the motif in resist layer, which is masking layer for the etching of metallic layer by various techniques (wet etching, reactive ion etching). Technical documentation of developed processes and prepared samples are also the part of the project.
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Detecting plasticity in al thin films by means of bulge test
Holzer, Jakub ; Pikálek, Tomáš ; Buchta, Zdeněk ; Lazar, Josef ; Tinoco, H.A. ; Chlupová, Alice ; Náhlík, Luboš ; Sobota, Jaroslav ; Fořt, Tomáš ; Kruml, Tomáš
The Bulge test proved to be a useful tool for measuring elastic properties of thin films and\nfree standing membranes, particularly Young’s modulus and residual stress. The basic principle\nof bulge test is application of differential pressure on one side of the a membrane, measurement of\nthe shape of bulged surface as a function of pressure, in this case via laser interferometer, and\nevaluation of a pressure-deflection relationship. In this study, bilayer membrane consisting of a\nsilicon nitride supporting layer and an aluminium layer deposited by means of magnetron\nsputtering is subjected to the bulge test. The results clearly show signs of a non-linear behavior\nthat is caused by plastic deformation in the aluminium layer. Finite element analysis is being\ndeveloped to describe this behavior because analytical model using deflection of central point and\npressure relation falls apart in case of non-linearity.
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Reflectivity of a mirror in XUV spectral region (46.9 nm).
Schmidt, Jiří ; Koláček, Karel ; Štraus, Jaroslav ; Frolov, Oleksandr ; Prukner, Václav ; Melich, Radek ; Psota, Pavel ; Sobota, Jaroslav ; Fořt, Tomáš
A focusing mirror as an optical element is used in our applications that require light collection (e.g. for laser ablation studies). A knowledge of the mirror reflectivity is important for determination of focused laser pulse energy, or for determination of local fluencies near the laser focus. The reflectivity of our spherical focusing mirror with(/without) multi-layer coating was measured. Reflection coefficients of this mirror in a long period of time are also reported. Further, the incidence-angle dependence of the XUV reflectivity of flat mirrors is presented as well.
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Interferometrical system for bulge test thin film characterization
Pikálek, Tomáš ; Holzer, Jakub ; Tinoco, H.A. ; Buchta, Zdeněk ; Lazar, Josef ; Chlupová, Alice ; Náhlík, Luboš ; Sobota, Jaroslav ; Fořt, Tomáš ; Kruml, Tomáš
Behavior of thin film materials undergoing stress and deformation differs from bulk materials. A common method for the mechanical characterization of thin films is nanoindentation based on indenting a small tip into the material. A different approach is a bulge test technique. In this method, a differential pressure is applied on a free-standing membrane and the mechanical properties (Young’s modulus and residual stress) are calculated from the shape of the bulged membrane. In our experiments, we developed an interferometrical system for the membrane shape measurement during the bulge test.
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