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Pulsní laserová depozice homogenních DLC vrstev
Kocourek, Tomáš ; Jelínek, Miroslav ; Lančok, Ján ; Bulíř, Jiří
The goal of the experiment is to achive a homogenous thickness profile of DLC films on the substrate of dimension of 30 mm in diameter. Such layers can be used to cover artificial heart valves - DLC is a bio-inert material
Nanokrystalické diamantové vrstvy deponované hybridní pulsní laserovou depozicí
Novotný, Michal ; Jelínek, Miroslav ; Bulíř, Jiří ; Lančok, Ján ; Vorlíček, Vladimír
We used pulsed laser deposition (PLD) and hybrid PLD (HPLD) techniques for NCD thin films preparation. KrF excimer laser beam (Lumonics, .lambda.=248 nm , 20 ns, 500 mJ) was focused on graphite target with energy density of 4-7 J.cm.sup.- 2./sup.. Films were deposited on sapphire and Si(100) substrates in hydrogen and argon/hydrogen ambient
Vliv RF výboje na růst nanokrystalických diamantových vrstev deponovaných metodou pulsní laserové depozice
Novotný, Michal ; Jelínek, Miroslav ; Bulíř, Jiří ; Lančok, Ján ; Vorlíček, Vladimír ; Michalka, M. ; Popov, C.
In this paper, we report on the growth of NCD films by PLD in pure hydrogen ambient and by HPLD in Ar/H.sub.2./sub. ambient. HPLD systems were based on combination of PLD and addiational RF discharges. The deposited films were studied using Alfastep profilometer, X-ray diffraction, Raman spectroscopy and scanning electron microscopy

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