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Development of the sample holder for electrical diagnostics in UHV SEM
Axman, Tomáš ; Pavera, Michal (referee) ; Bábor, Petr (advisor)
This bachelor thesis focuses on design and testing of a sample holder enabling for cooling and heating of the sample in ultra-high vacuum apparatus for scanning electron microscope, developed in cooperation with Tescan company. In the theoretical part the currently used sample holders in similar UHV systems are described and their positives and negatives are discussed including material selection. The experimental part describes designing of the sample holder with respect to the required number of electrical contacts for measuring electrical properties of the samples and UHV compatibility. Measurement and testing of the manufactured sample at low and high temperatures is presented.
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Optimization of UHV SEM for nanostructure study in wide temperature range
Axman, Tomáš ; Zigo,, Juraj (referee) ; Bábor, Petr (advisor)
This diploma thesis deals with the optimization of ultra-high vacuum scanning electron microscope - UHV SEM, which is developed within the Amispec project in cooperation with BUT, Institute of Scientific Instruments of the Czech Academy of Science and Tescan Brno, s.r.o. The theoretical part deals with the description of the actual state of the developed equipment and the research of competing systems. The next part describes the optimization of the sample holder and the pallet receptor for studying nanostructures over a wide range of temperatures. Part of the optimization is the sapphire thermal diode development and experimental verification of the functionality of the designed components. This is followed by the verification of the functionality of the whole system for the transport of samples to the UHV area, deposition with effusion cell and in-situ observations.
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Optimization of UHV SEM for nanostructure study in wide temperature range
Axman, Tomáš ; Zigo,, Juraj (referee) ; Bábor, Petr (advisor)
This diploma thesis deals with the optimization of ultra-high vacuum scanning electron microscope - UHV SEM, which is developed within the Amispec project in cooperation with BUT, Institute of Scientific Instruments of the Czech Academy of Science and Tescan Brno, s.r.o. The theoretical part deals with the description of the actual state of the developed equipment and the research of competing systems. The next part describes the optimization of the sample holder and the pallet receptor for studying nanostructures over a wide range of temperatures. Part of the optimization is the sapphire thermal diode development and experimental verification of the functionality of the designed components. This is followed by the verification of the functionality of the whole system for the transport of samples to the UHV area, deposition with effusion cell and in-situ observations.
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Development of the sample holder for electrical diagnostics in UHV SEM
Axman, Tomáš ; Pavera, Michal (referee) ; Bábor, Petr (advisor)
This bachelor thesis focuses on design and testing of a sample holder enabling for cooling and heating of the sample in ultra-high vacuum apparatus for scanning electron microscope, developed in cooperation with Tescan company. In the theoretical part the currently used sample holders in similar UHV systems are described and their positives and negatives are discussed including material selection. The experimental part describes designing of the sample holder with respect to the required number of electrical contacts for measuring electrical properties of the samples and UHV compatibility. Measurement and testing of the manufactured sample at low and high temperatures is presented.
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