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Application of low temperature plasma jet systems for the deposition of thin films
Hubička, Zdeněk ; Kment, Štěpán ; Olejníček, Jiří ; Čada, Martin ; Straňák, V. ; Klusoň, J. ; Tichý, M. ; Klusoň, Petr
The low pressure DC pulsed or RF pulsed modulated hollow cathode plasma jets worked on the principle of the reactive sputtering of the hollow cathode usually in the gas mixture of Ar + O2 or N2. The DC pulsed power supplier was applied with combination of the RF source for the plasma jets generation. It was clearly demonstrated that properties of TiO2 and TiO2:N films significantly depended on the plasma parameters. First, the produced films were characterized with the aid of a number of methods (AFM, SEM, XRD, Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), UV–vis spectrometry). Further, the films were judged in terms of their specific optical functionality to generate photocurrents upon being illuminated with spectrally well defined narrow light beams. The parameters of the chemically reactive plasma in the jets were determined using the time-resolved Langmuir probe system. The measurement of the ion energy distribution function was performed by means of the RFA.
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Thin Functional Films of TiO2 Nanoparticles
Morozová, Magdalena ; Klusoň, Petr ; Hejda, S. ; Kment, Štěpán ; Šolcová, Olga
Magnetron Sputtering and the Modulated Hollow Cathode Plasma Jet Sputtering. As chemical method the sol-gel process carried out in the templating environment as dip-coating and piezo-jet printing was employed. The produced films differed in many structural characteristics and also in their photoelectrochemical behaviour, as the primary sought function. The produced layers were described by means of atomic force microscopy, scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, ultraviolet-visible spectroscopy, Raman spectroscopy, ellipsometry and profilometry. Then the films were used as electrodes in photoelectrochemical experiments.
Plný text:  PDF
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Photo-Electrochemical Properties of Hierarchical Nanocomposite Structure: Carbon Nanofibers/TiO2/ZnO Thin Films
Hubička, Zdeněk ; Kment, Štěpán ; Gregora, Ivan ; Čada, Martin ; Olejníček, Jiří ; Klusoň, Petr ; Petras, D. ; Krýsa, J. ; Jastrabík, Lubomír ; Dytrych, Pavel
In this contribution we report on photoelectrochemical functionality of the multilayers system consisting of CNF's/photoactive anatase TiO2/ conductive ZnO thin films. Recently the thin phthalocyanines films has been prepared and studied individually.
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