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Estimation of mechanical parameters of thin films using finite element analysis
Tinoco Navaro, Hector Andres ; Holzer, Jakub ; Pikálek, Tomáš ; Buchta, Zdeněk ; Lazar, Josef ; Chlupová, Alice ; Kruml, Tomáš ; Hutař, Pavel
This study shows a methodology to estimate mechanical parameters of thin films by means of a bulge\ntest and a numerical approach. The methodology is based on the combination of finite element analysis with a\nclassical analytical method. Finite element modelling was conducted for monolayer (Si3N4) membranes of 2x2mm\nwith the aim to approximate both the load-deflection curves experimentally measured and the classical loaddeflection\nanalytical model. Error functions were constructed and minimized to delimit a coupled solution space\nbetween Young’s modulus and Poison’s ratio. In a traditional bulge test analysis only one of the elastic properties\ncan be determined due to that there is not unique solution in the estimations of these parameters. However, both\nelastic parameters were determined through the proposed numerical procedure which compares the deformed\nsurfaces for a specific set of optimal elastic parameters computed. Results shows that the estimated elastic\nproperties agree with corresponding values determined by other methods in the literature