|
|
Estimation of mechanical properties of thin films using numerical modelling of experimental tests
Tinoco Navarro, Hector Andres ; Jančo,, Roland (oponent) ; Klusák,, Jan (oponent) ; Hutař, Pavel (vedoucí práce)
Bulge testing is an experimental technique that involves the use of numerical and analytical approaches to characterize the mechanical properties of thin films. This thesis addresses some limitations found in the classical models that describe the behavior of thin films subjected to this test. This required the development of new models and numerical strategies in order to determine several mechanical properties of monolayer and bilayer thin films under different structural conditions, such as elasticity, plasticity, and fracture. By combining finite element analysis and classical analytical solutions, different methodologies for calculating the elastic properties (E and v), residual stresses, yield stress, and fracture toughness were proposed and validated. The mechanical properties of silicon nitride, aluminum, and gold films were characterized using load-deflection experimental data obtained from bulging measurements. The determined properties showed reasonable agreement with materials of known properties, which validated that the proposed methods in this work can be useful for estimating the mechanical properties of freestanding thin films.
|
|
|
Estimation of mechanical parameters of thin films using finite element analysis
Tinoco Navaro, Hector Andres ; Holzer, Jakub ; Pikálek, Tomáš ; Buchta, Zdeněk ; Lazar, Josef ; Chlupová, Alice ; Kruml, Tomáš ; Hutař, Pavel
This study shows a methodology to estimate mechanical parameters of thin films by means of a bulge\ntest and a numerical approach. The methodology is based on the combination of finite element analysis with a\nclassical analytical method. Finite element modelling was conducted for monolayer (Si3N4) membranes of 2x2mm\nwith the aim to approximate both the load-deflection curves experimentally measured and the classical loaddeflection\nanalytical model. Error functions were constructed and minimized to delimit a coupled solution space\nbetween Young’s modulus and Poison’s ratio. In a traditional bulge test analysis only one of the elastic properties\ncan be determined due to that there is not unique solution in the estimations of these parameters. However, both\nelastic parameters were determined through the proposed numerical procedure which compares the deformed\nsurfaces for a specific set of optimal elastic parameters computed. Results shows that the estimated elastic\nproperties agree with corresponding values determined by other methods in the literature
|
|
|
Development of the bulge test equipment for measuring mechanical properties of thin films
Holzer, Jakub ; Pikálek, Tomáš ; Buchta, Zdeněk ; Lazar, Josef ; Tinoco, H.A. ; Chlupová, Alice ; Kruml, Tomáš
The bulge test apparatus designed for the measurement of mechanical material properties of thin films was constructed and tested. The principle of the test is to apply pressure on a free-standing membrane, to measure the membrane shape and to analyse the results. Commercially available silicon nitride (Si3N4) thin films were used for the testing. It is shown that interferometric set-up designed and assembled for the apparatus enables precise determination of 3D shape of the whole membrane, which allows more precise determination of materials parameters compared to measurement of the height of the center of the membrane only. Fit of an analytical formula gives values of Young modulus and residual stress with very good agreement with the literature data. Moreover, FEM model of the bulged membrane was developed. The main aim of the effort is to enable measurement of plastic properties of a thin film of interest, that will be deposited on the Si3N4 membrane with known properties and bulge test will be performed on the bilayer specimen. Subsequently, the material properties of the thin film will be obtained using FEM analysis.
|
|
|
Detecting plasticity in al thin films by means of bulge test
Holzer, Jakub ; Pikálek, Tomáš ; Buchta, Zdeněk ; Lazar, Josef ; Tinoco, H.A. ; Chlupová, Alice ; Náhlík, Luboš ; Sobota, Jaroslav ; Fořt, Tomáš ; Kruml, Tomáš
The Bulge test proved to be a useful tool for measuring elastic properties of thin films and\nfree standing membranes, particularly Young’s modulus and residual stress. The basic principle\nof bulge test is application of differential pressure on one side of the a membrane, measurement of\nthe shape of bulged surface as a function of pressure, in this case via laser interferometer, and\nevaluation of a pressure-deflection relationship. In this study, bilayer membrane consisting of a\nsilicon nitride supporting layer and an aluminium layer deposited by means of magnetron\nsputtering is subjected to the bulge test. The results clearly show signs of a non-linear behavior\nthat is caused by plastic deformation in the aluminium layer. Finite element analysis is being\ndeveloped to describe this behavior because analytical model using deflection of central point and\npressure relation falls apart in case of non-linearity.
|
|
|
Interferometrický systém pro měření deformace tenkých membrán
Pikálek, Tomáš ; Holzer, Jakub ; Tinoco, H.A. ; Buchta, Zdeněk ; Lazar, Josef ; Chlupová, Alice ; Náhlík, Luboš ; Sobota, Jaroslav ; Fořt, Tomáš ; Kruml, Tomáš
Mechanické vlastnosti tenkých vrstev se mohou výrazně lišit od běžných materiálů. Příkladem metody pro jejich měření je například nanoindentace založená na zatlačování miniaturního hrotu do materiálu. Jinou metodou je tzv. bulge test, který je založen na určení mechanických vlastností (obvykle Youngova modulu a reziduálního napětí) samonosných tenkých vrstev (membrán) z jejich deformace při aplikování diferenčního tlaku z jedné jejich strany. Pro měření tvaru membrán během tohoto bulge testu byl vyvinut interferometrický systém.
|
host ::
RSS.