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Use of a special optical fiber in an electron microscope chamber
Černek, Ondrej ; Konečný, Martin (referee) ; Pavera, Michal (advisor)
This bachelor thesis is concerned about the modification of vacuum chamber of the Scanning Electron Microscope VEGA developed by TESCAN Brno s.r.o. in order to implementation of Scanning Probe Microscope. Moreover, it is dedicated to development of apparatus for using hollow optical fiber allowing the guidance of light and various gases on the sample surface placed in the vacuum of electron microscope. By using the hollow optical fiber as a probe of Scanning Probe Microscope, it is possible to work with a tip with specific properties. A brief introduction to Scanning Electron Microscopy and Atomic Force Microscopy is presented in the theoretical part. Furthermore, there is a technique of using optical fibers in Scanning Near-field Optical Microscopy described. Also a problem of vacuum systems, gas flow through the pipe and technique of Gas Injection System is introduced. In the construction part, there are initiated steps in the development of the vacuum chamber and the apparatus allowing the guidance of hollow optical fiber into the chamber of microscope. The experimental part presents the result of measurements obtained by probe of Scanning Probe Microscope with modified optical fiber and gas transmissivity of hollow optical fiber.