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Preparation of ZnO Layers by Surfatron with Possible Photo-Catalytic Usage
Dytrych, Pavel ; Slater, M. ; Klusoň, Petr ; Churpita, Olexandr ; Hubička, Zdeněk ; Čada, Martin ; Morozová, Magdalena ; Zita, B. ; Krýsa, J. ; Straňák, Vítězslav
Pecvd method in this contribution we deal with the preparation of thin layers of ZnO, which exhibit interesting photo-sensitive properties. ZnO functional layers were prepared by surfatron by a PECVD method.

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