Original title: Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization
Authors: Kromka, Alexander ; Babchenko, Oleg ; Ižák, Tibor ; Potocký, Štěpán ; Davydova, Marina ; Neykova, Neda ; Kozak, Halyna ; Remeš, Zdeněk ; Hruška, Karel ; Rezek, Bohuslav
Document type: Papers
Conference/Event: NANOCON 2011. International Conference /3./, Brno (CZ), 2011-09-21 / 2011-09-23
Year: 2011
Language: eng
Abstract: A technological progress in the large area growth of diamond films and carbon nanotubes by the modified linear antenna MW system is presented. We show a correlation between process parameters and nano- or poly-crystalline film character. A challenging part, diamond coated mirrors or ATR prisms, are shown as multifunctional optical elements suitable for detection of absorbed molecules. Additional positive feature of the presented plasma system is low temperature hydrogen functionalization of diamond films. Finally, we present that combination of pulsed MW plasma with radiofrequency substrate biasing results in growth of oriented CNTs over large area.
Keywords: CNT; CVD deposition; diamond; graphene; microwave plasma
Project no.: CEZ:AV0Z10100521 (CEP), GAP108/11/0794 (CEP), MEB0810082 (CEP), KAN400100701 (CEP), IAAX00100902 (CEP)
Funding provider: GA ČR, GA MŠk, GA AV ČR, GA AV ČR
Host item entry: NANOCON 2011. Conference proceedings, ISBN 978-80-87294-27-7

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0207655

Permalink: http://www.nusl.cz/ntk/nusl-96336


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