Original title:
Laser-induced surface acoustic waves for thin film characterization
Authors:
Kudělka, R. ; Václavek, L. ; Tomáštík, Jan ; Malecová, S. ; Čtvrtlík, R. Document type: Papers Conference/Event: International Conference on Local Mechanical Properties /14./, Prague (CZ), 20191106
Year:
2020
Language:
eng Abstract:
Knowledge of mechanical properties of thin films is essential for most of their applications.However, their determination can be problematic for very thin films. LAW (Laser-induced acousticwaves) is a combined acousto-optic method capable of measuring films with thickness from fewnanometers. It utilizes ultrasound surface waves which are excited via short laser pulses and detectedby a PVDF foil. Properties such as Young’s modulus, Poisson’s ratio and density of both the film andthe substrate as well as film thickness can be explored.Results from the LAW method are successfullycompared with nanoindentation for Young’s modulus evaluation and with optical method for filmthickness evaluation and also with literature data. Application of LAW for anisotropy mapping ofmaterials with cubic crystallographic lattice is also demonstrated
Keywords:
anisotropy; laser-induced surface acoustic waves; nanoindentation; thin films; Young’s modulus Host item entry: Acta Polytechnica CTU Proceedings, ISBN 978-80-01-06735-2, ISSN 2336-5382
Institution: Institute of Physics AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0315395