Original title: Hloubkové profilování multivrstev metodou LEIS
Translated title: Depth profiling of multilayers by LEIS
Authors: Strapko, Tomáš ; Duda, Radek (referee) ; Bábor, Petr (advisor)
Document type: Master’s theses
Year: 2019
Language: eng
Publisher: Vysoké učení technické v Brně. Fakulta strojního inženýrství
Abstract: [eng] [cze]

Keywords: LEIS; model jednonásobního odrazu; Nízkoenergiový iontový rozptyl; TRBS; LEIS; Low Energy Ion Scattering; single-scattering model; TRBS

Institution: Brno University of Technology (web)
Document availability information: Fulltext is available in the Brno University of Technology Digital Library.
Original record: http://hdl.handle.net/11012/179131

Permalink: http://www.nusl.cz/ntk/nusl-402576


The record appears in these collections:
Universities and colleges > Public universities > Brno University of Technology
Academic theses (ETDs) > Master’s theses
 Record created 2019-08-26, last modified 2022-09-04


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