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Original title:
Silver micro drop structured twice around the earth
Authors: Meluzín, Petr ; Tryhuk, V. ; Horáček, Miroslav ; Knápek, Alexandr ; Krátký, Stanislav ; Matějka, Milan ; Kolařík, Vladimír
Document type: Papers
Conference/Event: International Conference on Metallurgy and Materials /27./. METAL 2018, Brno (CZ), 20180523
Year: 2018
Language: eng
Abstract: Planar micro structuring of thin metallic layers allows to achieve required surface properties of metallic layers covering bulk materials. Recently, the arrangement of micro holes or pillars placed around the primary spiral according to a phyllotactic model was presented. This deterministically aperiodic planar arrangement was used for benchmarking purposes of the e-beam writer patterning. This arrangement based on single primary spiral and a variety of derived secondary spirals has several interesting properties. One of them is a very low ratio between the area populated by individual micro elements and the length of the primary phyllotactic spiral. This paper presents analysis of the phyllotactic spiral length and the rising gradient at the spiral outer edge. The practical part of the presented work deals with the patterning of a thin silver layer deposited on the silicon or glass substrates using e-beam pattern generation, lithography techniques and related technologies. An interesting impact of the mentioned spiral properties on the e-beam writing strategies and the exposure ordering strategy are also discussed.
Keywords: e-beam writer; metallic thin layer; phyllotactic spiral; planar surface structure
Project no.: TE01020233 (CEP), TG03010046 (CEP), LO1212 (CEP), ED0017/01/01
Funding provider: GA TA ČR, GA TA ČR, GA MŠk, GA MŠk
Host item entry: Metal 2018 - 27th International conference on metallurgy and materials, Conference Proceedings, ISBN 978-80-87294-84-0
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0292979
Permalink: http://www.nusl.cz/ntk/nusl-391584
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Authors: Meluzín, Petr ; Tryhuk, V. ; Horáček, Miroslav ; Knápek, Alexandr ; Krátký, Stanislav ; Matějka, Milan ; Kolařík, Vladimír
Document type: Papers
Conference/Event: International Conference on Metallurgy and Materials /27./. METAL 2018, Brno (CZ), 20180523
Year: 2018
Language: eng
Abstract: Planar micro structuring of thin metallic layers allows to achieve required surface properties of metallic layers covering bulk materials. Recently, the arrangement of micro holes or pillars placed around the primary spiral according to a phyllotactic model was presented. This deterministically aperiodic planar arrangement was used for benchmarking purposes of the e-beam writer patterning. This arrangement based on single primary spiral and a variety of derived secondary spirals has several interesting properties. One of them is a very low ratio between the area populated by individual micro elements and the length of the primary phyllotactic spiral. This paper presents analysis of the phyllotactic spiral length and the rising gradient at the spiral outer edge. The practical part of the presented work deals with the patterning of a thin silver layer deposited on the silicon or glass substrates using e-beam pattern generation, lithography techniques and related technologies. An interesting impact of the mentioned spiral properties on the e-beam writing strategies and the exposure ordering strategy are also discussed.
Keywords: e-beam writer; metallic thin layer; phyllotactic spiral; planar surface structure
Project no.: TE01020233 (CEP), TG03010046 (CEP), LO1212 (CEP), ED0017/01/01
Funding provider: GA TA ČR, GA TA ČR, GA MŠk, GA MŠk
Host item entry: Metal 2018 - 27th International conference on metallurgy and materials, Conference Proceedings, ISBN 978-80-87294-84-0
Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0292979
Permalink: http://www.nusl.cz/ntk/nusl-391584
The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers
Record created 2019-02-13, last modified 2022-09-29