Název: Silver micro drop structured twice around the earth
Autoři: Meluzín, Petr ; Tryhuk, V. ; Horáček, Miroslav ; Knápek, Alexandr ; Krátký, Stanislav ; Matějka, Milan ; Kolařík, Vladimír
Typ dokumentu: Příspěvky z konference
Konference/Akce: International Conference on Metallurgy and Materials /27./. METAL 2018, Brno (CZ), 20180523
Rok: 2018
Jazyk: eng
Abstrakt: Planar micro structuring of thin metallic layers allows to achieve required surface properties of metallic layers covering bulk materials. Recently, the arrangement of micro holes or pillars placed around the primary spiral according to a phyllotactic model was presented. This deterministically aperiodic planar arrangement was used for benchmarking purposes of the e-beam writer patterning. This arrangement based on single primary spiral and a variety of derived secondary spirals has several interesting properties. One of them is a very low ratio between the area populated by individual micro elements and the length of the primary phyllotactic spiral. This paper presents analysis of the phyllotactic spiral length and the rising gradient at the spiral outer edge. The practical part of the presented work deals with the patterning of a thin silver layer deposited on the silicon or glass substrates using e-beam pattern generation, lithography techniques and related technologies. An interesting impact of the mentioned spiral properties on the e-beam writing strategies and the exposure ordering strategy are also discussed.
Klíčová slova: e-beam writer; metallic thin layer; phyllotactic spiral; planar surface structure
Číslo projektu: TE01020233 (CEP), TG03010046 (CEP), LO1212 (CEP), ED0017/01/01
Poskytovatel projektu: GA TA ČR, GA TA ČR, GA MŠk, GA MŠk
Zdrojový dokument: Metal 2018 - 27th International conference on metallurgy and materials, Conference Proceedings, ISBN 978-80-87294-84-0

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0292979

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-391584


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference