Original title: SMV-2018-05: Vývoj testovacích preparátů pro REM
Translated title: SMV-2018-05: Development of test specimens for SEM
Authors: Matějka, Milan ; Horáček, Miroslav ; Meluzín, Petr ; Chlumská, Jana ; Král, Stanislav ; Kolařík, Vladimír ; Krátký, Stanislav ; Knápek, Alexandr
Document type: Research reports
Year: 2018
Language: cze
Abstract: [cze] [eng]

Keywords: e-beam lithography; microlithography; relief structure; silicon etching

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0291155

Permalink: http://www.nusl.cz/ntk/nusl-390745


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Research > Institutes ASCR > Institute of Scientific Instruments
Reports > Research reports
 Record created 2019-01-07, last modified 2019-03-28


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