Original title: STEM modes in SEM
Authors: Konvalina, Ivo ; Paták, Aleš ; Mikmeková, Eliška ; Mika, Filip ; Müllerová, Ilona
Document type: Papers
Conference/Event: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, Skalský dvůr (CZ), 20180604
Year: 2018
Language: eng
Abstract: The segmented semiconductor STEM detector in the Magellan 400 FEG SEM microscope\n(https://www.fei.com/) is used to detect transmitted electrons (TEs) and allows observing\nsamples in four imaging modes. Two modes of objective lens, namely high resolution (HR)\nand ultra-high resolution (UHR), differ by their resolution and by the presence or absence of\na magnetic field around the sample. If the beam deceleration (BD) mode is chosen, then\nan electrostatic field around the sample is added and two further microscope modes HR + BD\nand UHR + BD, become available. Trajectories of TEs are studied with regard to their angular\nand energy distribution in each mode in this work.\n
Keywords: SEM; STEM
Project no.: TE01020118 (CEP), LO1212 (CEP), ED0017/01/01
Funding provider: GA TA ČR, GA MŠk, GA MŠk
Host item entry: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar, ISBN 978-80-87441-23-7

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0287599

Permalink: http://www.nusl.cz/ntk/nusl-387504


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Research > Institutes ASCR > Institute of Scientific Instruments
Conference materials > Papers