TY - GEN TI - STEM modes in SEM T3 - Recent Trends in Charged Particle Optics and Surface Physics Instrumentation AU - Konvalina, Ivo AB - The segmented semiconductor STEM detector in the Magellan 400 FEG SEM microscope\n(https://www.fei.com/) is used to detect transmitted electrons (TEs) and allows observing\nsamples in four imaging modes. Two modes of objective lens, namely high resolution (HR)\nand ultra-high resolution (UHR), differ by their resolution and by the presence or absence of\na magnetic field around the sample. If the beam deceleration (BD) mode is chosen, then\nan electrostatic field around the sample is added and two further microscope modes HR + BD\nand UHR + BD, become available. Trajectories of TEs are studied with regard to their angular\nand energy distribution in each mode in this work.\n SN - 978-80-87441-23-7 UR - http://hdl.handle.net/11104/0287599 UR - http://www.nusl.cz/ntk/nusl-387504 A2 - Müllerová, Ilona A2 - Mikmeková, Eliška A2 - Mika, Filip A2 - Paták, Aleš LA - eng KW - SEM KW - STEM PY - 2018 PB - Ústav přístrojové techniky, Královopolská 147, 612 64 Brno, http://www.isibrno.cz/ ER -