Název: Examination of 2D crystals in a low voltage SEM/STEM
Autoři: Mikmeková, Eliška ; Frank, Luděk ; Polčák, J. ; Paták, Aleš ; Lejeune, M.
Typ dokumentu: Příspěvky z konference
Konference/Akce: Multinational Congress on Microscopy /13./, Rovinj (HR), 20170924
Rok: 2017
Jazyk: eng
Abstrakt: Development of new types of materials such as 2D crystals (graphene, MoS2, WS2, h-BN, etc.) requires emergence of new surface-sensitive techniques for their characterization. As regards the “surface” sensitivity, the (ultra) low energy electron microscopy can become a very powerful tool for true examination of these atom-thick materials, capable of confirming physical phenomena predicted to occur on their surfaces. Modern commercial scanning electron microscopes enable imaging and analyses by low energy electrons even at very high magnification. In the case of the SEM, resolution even below 1 nm can be achieved at low landing energy of electrons. Since specimen contamination increases with increasing electron dose and decreasing landing energy, specimen cleanness is a critical factor in obtaining meaningful data. A range of various specimen cleaning methods can be applied to selected samples. Typical cleaning methods, such as solvent rinsing, heating, bombarding with ions and plasma etching have their limitations. Electron-induced in situ cleaning procedure can be gentle, experimentally convenient and very effective for wide range of specimens. Even a small amount of hydrocarbon contamination can severely impact on the results obtained with low energy electrons, as illustrated in Figure 1A. During the scanning of surfaces by electrons, the image usually darkens because of a carbonaceous layer gradually deposited on the top from adsorbed hydrocarbon precursors.
Klíčová slova: 2D crystals; contamination; low voltage SEM/STEM
Číslo projektu: TE01020118 (CEP)
Poskytovatel projektu: GA TA ČR
Zdrojový dokument: 13th Multinational Congress on Microscopy: Book of Abstracts, ISBN 978-953-7941-19-2

Instituce: Ústav přístrojové techniky AV ČR (web)
Informace o dostupnosti dokumentu: Dokument je dostupný v příslušném ústavu Akademie věd ČR.
Původní záznam: http://hdl.handle.net/11104/0277164

Trvalý odkaz NUŠL: http://www.nusl.cz/ntk/nusl-373318


Záznam je zařazen do těchto sbírek:
Věda a výzkum > AV ČR > Ústav přístrojové techniky
Konferenční materiály > Příspěvky z konference
 Záznam vytvořen dne 2018-03-09, naposledy upraven 2021-11-24.


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