Original title: Material properties of lithium fluoride for predicting XUV laser ablation rate and threshold fluence
Authors: Blejchař, T. ; Nevrlý, V. ; Vašinek, M. ; Dostál, Michal ; Pečínka, L. ; Dlabka, J. ; Stachoň, M. ; Juha, Libor ; Bitala, P. ; Zelinger, Zdeněk ; Pira, P. ; Wild, J.
Document type: Papers
Conference/Event: Conference on Damage to VUV, EUV, and X-Ray Optics V, Prague (CZ), 20150415
Year: 2015
Language: eng
Series: Proceedings of SPIE
Abstract: This paper deals with prediction of extreme ultraviolet (XUV) laser ablation of lithium fluoride at nanosecond timescales. Material properties of lithium fluoride were determined based on bibliographic survey. These data are necessary for theoretical estimation of surface removal rate in relevance to XUV laser desorption/ablation process. Parameters of XUV radiation pulses generated by the Prague capillary-discharge laser (CDL) desktop system were assumed in this context. Prediction of ablation curve and threshold laser fluence for lithium fluoride was performed employing XUV-ABLATOR code. Quasi-random sampling approach was used for evaluating its predictive capabilities in the means of variance and stability of model outputs in expected range of uncertainties. These results were compared to experimental data observed previously.
Keywords: ablation curve; lithium fluoride; quasi-random sampling; thermomechanic model; threshold fluence
Project no.: GAP108/11/1312 (CEP)
Funding provider: GA ČR
Host item entry: DAMAGE TO VUV, EUV, AND X-RAY OPTICS V. Proceedings of SPIE, ISBN 978-1-62841-632-9

Institution: J. Heyrovsky Institute of Physical Chemistry AS ČR (web)
Document availability information: Fulltext is available on demand via the digital repository of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0282044

Permalink: http://www.nusl.cz/ntk/nusl-371608


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Research > Institutes ASCR > J. Heyrovsky Institute of Physical Chemistry
Conference materials > Papers