Original title: SMV-2017-23: Optimalizace nanolitografie
Translated title: SMV-2017-23: Optimization of nanolitography
Authors: Jákl, Petr ; Šerý, Mojmír
Document type: Research reports
Year: 2017
Language: cze
Abstract: [cze] [eng]

Keywords: laser beam shaping; two photon photopolymerization

Institution: Institute of Scientific Instruments AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0278450

Permalink: http://www.nusl.cz/ntk/nusl-370685


The record appears in these collections:
Research > Institutes ASCR > Institute of Scientific Instruments
Reports > Research reports
 Record created 2017-12-20, last modified 2021-11-24


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