Original title: Mechanické a elektrické vlastnosti tenkých vrstev mikrokrystalického křemíku
Translated title: Mechanical and Electrical Properties of Microcrystalline Silicon Thin Films
Authors: Vetushka, Aliaksei ; Fejfar, Antonín (advisor) ; Čech, Vladimír (referee) ; Sládek, Petr (referee)
Document type: Doctoral theses
Year: 2011
Language: eng
Abstract: [eng] [cze]

Keywords: Atomic force microscopy; Chemical vapor deposition; Mechanical stress; Microcrystalline silicon; Raman scattering; Raman spectroscopy

Institution: Charles University Faculties (theses) (web)
Document availability information: Available in the Charles University Digital Repository.
Original record: http://hdl.handle.net/20.500.11956/34652

Permalink: http://www.nusl.cz/ntk/nusl-299123


The record appears in these collections:
Universities and colleges > Public universities > Charles University > Charles University Faculties (theses)
Academic theses (ETDs) > Doctoral theses
 Record created 2017-05-09, last modified 2022-03-04


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