Original title: Comparison study of metal carbide/nitride films using EDX, RBS and ERD
Authors: Peřina, Vratislav ; Macková, Anna ; Starý, V. ; Široký, P.
Document type: Papers
Conference/Event: EMAS Regional Workshop on Electron Probe Microanalysis Today - EMAS 2000 /4./, Trest (CZ), 2000-05-17 / 2000-05-20
Year: 2000
Language: eng
Project no.: GV202/97/K038 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of the EMAS Regional Workshop on Electron Probe Microanalysis Today EMAS 2000 /4./

Institution: Nuclear Physics Institute AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0081545

Permalink: http://www.nusl.cz/ntk/nusl-27714


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Research > Institutes ASCR > Nuclear Physics Institute
Conference materials > Papers
 Record created 2011-07-01, last modified 2024-01-26


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