Original title: Fabrication of 3D diamond membranes for microfluidic systems
Authors: Varga, Marián ; Babchenko, Oleg ; Bauerová, Pavla ; Hruška, Karel ; Jurka, Vlastimil ; Kromka, Alexander ; Rezek, Bohuslav
Document type: Papers
Conference/Event: International Conference NANOCON /6./, Brno (CZ), 2014-11-05 / 2014-11-07
Year: 2015
Language: eng
Abstract: Perfusion of cell medium, especially in microfluidic devices, can provide in-vivo-like conditions for cell cultures. The most recent demand on such systems is to include electronically active artificial cell support for in-situ monitoring. Diamond thin films exhibit advantageous combination of physical, mechanical, chemical, biocompatible and electronic properties for this purpose. In this work we explore two strategies for fabrication of self-standing three-dimensional nanocrystalline diamond membrane for implementation in microfluidic invivo like experiments: i) nucleation and chemical vapour deposition (CVD) growth of diamond on porous 3D carbon foam (with 80 pores per inch) and ii) selective diamond growth predefined by photolithographic processing using copper grid mask. The morphology and material quality of the fabricated membranes are characterized by scanning electron microscopy and Raman spectroscopy.
Keywords: carbon foam; membranes; microfluidics; microwave plasma; nanocrystalline diamond
Project no.: GAP108/12/0996 (CEP)
Funding provider: GA ČR
Host item entry: NANOCON 2014, 6th International Conference, ISBN 978-80-87294-53-6

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0238838

Permalink: http://www.nusl.cz/ntk/nusl-177644


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