Original title:
Growth of diamond thin films: a review
Authors:
Kromka, Alexander ; Potocký, Štěpán ; Rezek, Bohuslav Document type: Papers Conference/Event: Potential and Applications of Surface Nanotreatment of Polymers and Glass 2012 (PASNPG 2012), Brno (CZ), 2012-10-15 / 2012-10-17
Year:
2012
Language:
eng Abstract:
Diamond is shown as an extraordinary material which offers promising solution for variety of fundamental studies and industrial uses. Here, growth of synthetic diamond films at low pressures (1 atm) and low temperatures (<1000°C) from carbon consisting gas mixtures is discussed. Variety of chemical vapor deposition techniques are reviewed, their advantages and disadvantages are pointed out too.
Keywords:
chemical vapor deposition; diamond; microwave plasma; raman spectroscopy Project no.: GAP108/12/0910 (CEP), GAP108/11/0794 (CEP), LH12186 (CEP) Funding provider: GA ČR, GA ČR, GA MŠk Host item entry: Potential and Applications of Surface Nanotreatment of Polymers and Glass 2012 (PASNPG 2012) - Book of Extended Abstracts, ISBN 978-80-210-5979-5
Institution: Institute of Physics AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0226899