Original title: Study of nucleation and growth of diamond thin films
Authors: Ižák, Tibor ; Babchenko, Oleg ; Varga, Marián ; Potocký, Štěpán ; Marton, M. ; Vojs, M. ; Domonkos, Mária ; Kromka, Alexander
Document type: Papers
Conference/Event: Winter Education Seminar /3. /, Rokytnice nad Jizerou (CZ), 2012-02-01 / 04.02. 2012
Year: 2012
Language: eng
Abstract: This study deals with the nucleation and growth of CVD diamond films on Si substrates. In nucleation part two different nucleation methods were studied: (i) the bias enhanced nucleation (BEN) and (ii) ultrasonic seeding. In the case of BEN, (i) the nucleation time and (ii) the influence of bias voltage were studied. For ultrasonic seeding the effect of different solutions of ultradisperzed detonation nanodiamond (UDD) powder with metal particles on the nucleation efficiency and growth process was investigated (i.e. diamond powder, nanosized Ni, microsized Co and Y metal powders).
Keywords: growth of NCD; MW-PECVD; nanocrystalline diamond; nucleation of NCD
Project no.: GBP108/12/G108 (CEP)
Funding provider: GA ČR
Host item entry: Proceedings of the 3rd Winter Education Seminar in Rokytnice nad Jizerou 2012, ISBN 978-80-260-3425-4

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0225846

Permalink: http://www.nusl.cz/ntk/nusl-161432


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Research > Institutes ASCR > Institute of Physics
Conference materials > Papers