Original title:
Influence of methane concentration on diamond film morphology and growth rate
Authors:
Ižák, Tibor ; Babchenko, Oleg ; Kromka, Alexander ; Potměšil, Jiří ; Hruška, Karel Document type: Papers Conference/Event: Winter educational seminar /2./, Rokytnice n. J. (CZ), 2011-02-16 / 2011-02-18
Year:
2011
Language:
eng Abstract:
In this study we investigated the influence of methane concentration on the diamond film growth. The experiments were carried out in focused microwave chemical vapour deposition system. The methane concentration was varied from 0.5% to 10 % of CH4 in H2 atmosphere. The final film morphology, chemical composition and growth rate were investigated by scanning electron microscopy (SEM), Raman spectroscopy and optical reflectance measurement. We observed, that increasing of CH4 concentration enhances the growth rate, but at the expense of the diamond film quality.
Keywords:
methane concentration; microcrystalline; nanocrystalline diamond; Raman; SEM Project no.: CEZ:AV0Z10100521 (CEP), MEB0810082 (CEP), KAN400100701 (CEP), IAAX00100902 (CEP), MEB0810081 (CEP) Funding provider: GA MŠk, GA AV ČR, GA AV ČR, GA MŠk Host item entry: Proceedings of the 2nd Winter Education Seminar, ISBN 978-80-260-0911-5
Institution: Institute of Physics AS ČR
(web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences. Original record: http://hdl.handle.net/11104/0208098