Original title: Deposition of carbon nanotubes by MW PECVD method
Authors: Babchenko, Oleg ; Davydova, Marina ; Hruška, Karel ; Kromka, Alexander
Document type: Papers
Conference/Event: Winter educational seminar /2./, Rokytnice n. J. (CZ), 2011-02-16 / 2011-02-18
Year: 2011
Language: eng
Abstract: The report is about the growth of carbon nanotubes from CH4/H2 gas mixture applying linear antenna plasma system. We investigate growth of nanotubes in the different type of plasma and by using different catalyst particles.
Keywords: large area; nanotubes; plasma
Project no.: CEZ:AV0Z10100521 (CEP), MEB0810082 (CEP), KAN400100701 (CEP)
Funding provider: GA MŠk, GA AV ČR
Host item entry: Proceedings of the 2nd Winter Education Seminar, ISBN 978-80-260-0911-5

Institution: Institute of Physics AS ČR (web)
Document availability information: Fulltext is available at the institute of the Academy of Sciences.
Original record: http://hdl.handle.net/11104/0208089

Permalink: http://www.nusl.cz/ntk/nusl-109898


The record appears in these collections:
Research > Institutes ASCR > Institute of Physics
Conference materials > Papers